Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: August 02, 2025 | Last Modified: 2021-08-26 00:00:00

SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.

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Complete Metadata

@type	dcat:Dataset
accessLevel	public
accrualPeriodicity	irregular
bureauCode	[ "006:55" ]
contactPoint	{ "fn": "William Alexander Osborn", "hasEmail": "mailto:william.osborn@nist.gov" }
description	SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.
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identifier	ark:/88434/mds2-2450
keyword	[ "Cantilever", "LDV", "MEMS", "SRM 3461", "Stiffness", "laser Doppler vibrometer" ]
landingPage	https://data.nist.gov/od/id/mds2-2450
language	[ "en" ]
license	https://www.nist.gov/open/license
modified	2021-08-26 00:00:00
programCode	[ "006:045" ]
publisher	{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" }
references	[ "https://doi.org/10.1063/1.2764372", "https://doi.org/10.1088/0957-0233/17/10/041", "https://doi.org/10.1088/0957-4484/23/37/375702" ]
rights	Purchase is not required for data downloading. Users must complete registration form to download data.
theme	[ "Metrology:Acoustic/vibration metrology", "Metrology:Force metrology", "Nanotechnology:Nanofabrication/manufacturing", "Nanotechnology:Nanomechanics" ]
title	Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness