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Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: August 02, 2025 | Last Modified: 2021-08-26 00:00:00
SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.

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Complete Metadata
@type dcat:Dataset
accessLevel public
accrualPeriodicity irregular
bureauCode 
                                            [
  "006:55"
]
contactPoint 
                                            {
  "fn": "William Alexander Osborn",
  "hasEmail": "mailto:william.osborn@nist.gov"
}
description SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.
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]
identifier ark:/88434/mds2-2450
keyword 
                                            [
  "Cantilever",
  "LDV",
  "MEMS",
  "SRM 3461",
  "Stiffness",
  "laser Doppler vibrometer"
]
landingPage https://data.nist.gov/od/id/mds2-2450
language 
                                            [
  "en"
]
license https://www.nist.gov/open/license
modified 2021-08-26 00:00:00
programCode 
                                            [
  "006:045"
]
publisher 
                                            {
  "name": "National Institute of Standards and Technology",
  "@type": "org:Organization"
}
references 
                                            [
  "https://doi.org/10.1063/1.2764372",
  "https://doi.org/10.1088/0957-0233/17/10/041",
  "https://doi.org/10.1088/0957-4484/23/37/375702"
]
rights Purchase is not required for data downloading. Users must complete registration form to download data.
theme 
                                            [
  "Metrology:Acoustic/vibration metrology",
  "Metrology:Force metrology",
  "Nanotechnology:Nanofabrication/manufacturing",
  "Nanotechnology:Nanomechanics"
]
title Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

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