Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards"
Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Nicholas Ritchie",
"hasEmail": "mailto:nicholas.ritchie@nist.gov"
}
|
| description | Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra. |
| distribution |
[
{
"title": "READ_ME",
"format": "Text",
"mediaType": "text/plain",
"description": "The read_me file associated with this data set.",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2975/2975_README.txt"
},
{
"title": "STEM-in-SEM dataset",
"format": "ZIP Archive File",
"mediaType": "application/zip",
"description": "X-ray spectra and scripts in a zip file",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2975/STEMinSEM.zip"
}
]
|
| identifier | ark:/88434/mds2-2975 |
| issued | 2023-05-19 |
| keyword |
[
"NIST DTSA-II software",
"Quantitative electron-excited X-ray microanalysis",
"STEM-in-SEM",
"bulk standards",
"energy-dispersive spectrometry (EDS)",
"thickness",
"thin films"
]
|
| landingPage | https://data.nist.gov/od/id/mds2-2975 |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2023-04-04 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Materials:Ceramics",
"Materials:Composites",
"Materials:Materials characterization",
"Materials:Metals",
"Materials:Superconductors"
]
|
| title | Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards" |
