Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: August 02, 2025 | Last Modified: 2023-11-24 00:00:00

This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.

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Complete Metadata

bureauCode	[ "006:55" ]
identifier	ark:/88434/mds2-3116
issued	2024-02-09
landingPage	https://data.nist.gov/od/id/mds2-3116
language	[ "en" ]
programCode	[ "006:045" ]
references	[ "https://dx.doi.org/10.1088/2051-672X/ad44bb" ]
theme	[ "Metrology:Dimensional metrology" ]