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Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"
This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Thomas A. Germer",
"hasEmail": "mailto:thomas.germer@nist.gov"
}
|
| description | This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript. |
| distribution |
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{
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{
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{
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{
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{
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{
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{
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{
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{
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{
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"title": "23 um step - 07-05-2023/23 um Linearity Test level12 repeat00",
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level12 repeat04",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level12 repeat05",
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level13 repeat03",
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level13 repeat05",
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{
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{
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"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat00",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat01",
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat03",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat04",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat05",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level14 repeat06",
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{
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"title": "23 um step - 07-05-2023/23 um Linearity Test level15 repeat00",
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level15 repeat04",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level15 repeat05",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level15 repeat06",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level15 repeat07",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat00",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat01",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat02",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat03",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat04",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat05",
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level16 repeat06",
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{
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{
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"title": "23 um step - 07-05-2023/23 um Linearity Test level18 repeat00",
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{
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{
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{
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{
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{
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{
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{
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{
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{
"title": "23 um step - 07-05-2023/23 um Linearity Test level25 repeat07",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level00 repeat00",
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{
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level00 repeat03",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level00 repeat04",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level00 repeat05",
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{
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{
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{
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{
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{
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{
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{
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{
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{
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{
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{
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level02 repeat05",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level02 repeat06",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level02 repeat07",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level03 repeat06",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level03 repeat07",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat00",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat02",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat03",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat04",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat05",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat06",
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{
"title": "50 um step - 06-07-2023/50 um Linearity Test level04 repeat07",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level05 repeat04",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level05 repeat05",
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"title": "50 um step - 06-07-2023/50 um Linearity Test level05 repeat06",
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|
| identifier | ark:/88434/mds2-3116 |
| issued | 2024-02-09 |
| keyword |
[
"Coherent",
"Interferometry",
"Microscopy",
"Scanning"
]
|
| landingPage | https://data.nist.gov/od/id/mds2-3116 |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2023-11-24 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| references |
[
"https://dx.doi.org/10.1088/2051-672X/ad44bb"
]
|
| theme |
[
"Metrology:Dimensional metrology"
]
|
| title | Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement" |
