Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Metadata Last Checked: August 02, 2025 | Last Modified: 2022-10-10 00:00:00

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.

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Complete Metadata

bureauCode	[ "006:55" ]
identifier	ark:/88434/mds2-2815
issued	2022-10-14
landingPage	https://data.nist.gov/od/id/mds2-2815
language	[ "en" ]
programCode	[ "006:045" ]
theme	[ "Nanotechnology:Nanofabrication/manufacturing", "Nanotechnology:Nanomechanics", "Nanotechnology:Nanophotonics" ]