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Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography
Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Vladimir Aksyuk",
"hasEmail": "mailto:vladimir.aksyuk@nist.gov"
}
|
| description | Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300. |
| distribution |
[
{
"title": "Experimental data for figure 4(b)",
"mediaType": "text/csv",
"description": "Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm )",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4b_experimental_data.csv"
},
{
"title": "Experimental data for Figure 4c",
"mediaType": "text/csv",
"description": "High-Q optical resonance indicated with an red arrow in (b)",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_experimental_data.csv"
},
{
"title": "Fit data for Figure 4c",
"mediaType": "text/csv",
"description": "Lorentzian fit Q=64000",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_fit_data.csv"
},
{
"title": "Experimental data for figure 4d, 10 micrometer disk.",
"mediaType": "text/csv",
"description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_10um.csv"
},
{
"title": "Experimental data for Figure 4d, 5 micrometer disk",
"mediaType": "text/csv",
"description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_5um.csv"
}
]
|
| identifier | ark:/88434/mds2-2815 |
| issued | 2022-10-14 |
| keyword |
[
"cavity optomechanical sensors",
"integrated photonics"
]
|
| landingPage | https://data.nist.gov/od/id/mds2-2815 |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2022-10-10 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Nanotechnology:Nanofabrication/manufacturing",
"Nanotechnology:Nanomechanics",
"Nanotechnology:Nanophotonics"
]
|
| title | Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography |
