Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!"
EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[
"006:55"
]
|
| conformsTo | https://www.iso.org/standard/56211.html |
| contactPoint |
{
"fn": "Dale E. Newbury",
"hasEmail": "mailto:dale.newbury@nist.gov"
}
|
| description | EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided. |
| distribution |
[
{
"title": "5 keV X-ray spectra",
"format": "ZIP file",
"mediaType": "application/x-zip-compressed",
"description": "A collection of 5 keV electron excited X-ray spectra measured on an energy dispersive X-ray spectrometer with the necessary standards and meta-data.",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2853/5keV_Analysis_Spectrum_Archive.zip"
}
]
|
| identifier | ark:/88434/mds2-2853 |
| issued | 2023-01-11 |
| keyword |
[
"EDS",
"SDD",
"SEM",
"SEM-EDS",
"X-ray spectrometry",
"energy dispersive X-ray spectrometry",
"low beam energy",
"low keV",
"scanning electron microscopy",
"silicon-drift detector"
]
|
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2022-12-06 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Chemistry:Analytical chemistry",
"Materials:Ceramics",
"Materials:Composites",
"Materials:Materials characterization",
"Materials:Metals",
"Metrology:Amount of substance"
]
|
| title | Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!" |
