KLA stylus profilometry of Parylene C devices
We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Jacob Pawlik",
"hasEmail": "mailto:jacob.pawlik@nist.gov"
}
|
| description | We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured. |
| distribution |
[
{
"title": "KLA profilometry of Parylene C devices",
"mediaType": "application/x-zip-compressed",
"description": "Cross-sectional profiles of Pt CPWs coated in Parylene C and soaked in different microfluidic fluid conditions.",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2809/Profilometry.zip"
},
{
"title": "README",
"mediaType": "text/plain",
"downloadURL": "https://data.nist.gov/od/ds/mds2-2809/2809_README_edit.txt"
}
]
|
| identifier | ark:/88434/mds2-2809 |
| issued | 2023-01-04 |
| keyword |
[
"Microwave microfluidic spectroscopy",
"Parylene C",
"S-parameters",
"biomedical devices",
"dielectric spectroscopy",
"implantable devices",
"profilometry"
]
|
| landingPage | https://data.nist.gov/od/id/mds2-2809 |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2022-07-22 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Bioscience:Biomaterials",
"Electronics:Electromagnetics",
"Materials:Materials characterization",
"Metrology:Electrical/electromagnetic metrology",
"Physics:Spectroscopy"
]
|
| title | KLA stylus profilometry of Parylene C devices |
