NIST SRM 2135c Hyperspectral Tomography Tilt Series
Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).Data description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:Beam energy (keV): 300.0Probe current: 0.5 nAPixel size: 3.0 nmDwell time per pixel: 200 msecEnergy resolution: 10 eV/channelThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Andrew Herzing",
"hasEmail": "mailto:andrew.herzing@nist.gov"
}
|
| description | Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).Data description. The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:Beam energy (keV): 300.0Probe current: 0.5 nAPixel size: 3.0 nmDwell time per pixel: 200 msecEnergy resolution: 10 eV/channelThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition. |
| distribution |
[
{
"title": "3631_README",
"mediaType": "text/plain",
"downloadURL": "https://data.nist.gov/od/ds/mds2-3631/3631_README.txt"
},
{
"title": "NIST_SRM_2135c_EDX_Tomography",
"mediaType": "text/plain",
"downloadURL": "https://data.nist.gov/od/ds/mds2-3631/NIST_SRM_2135c_EDX_Tomography.zip"
}
]
|
| identifier | ark:/88434/mds2-3631 |
| keyword |
[
"3-D imaging",
"EDX",
"STEM",
"electron microscopy",
"electron tomography"
]
|
| landingPage | https://data.nist.gov/od/id/mds2-3631 |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2024-11-05 00:00:00 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Materials:Materials characterization",
"Nanotechnology",
"Nanotechnology:Nanomaterials",
"Nanotechnology:Nanometrology",
"Standards:Reference materials"
]
|
| title | NIST SRM 2135c Hyperspectral Tomography Tilt Series |
