Patent AT-E399739-T1: [Translated] MICROMECHANICAL SENSOR
A micromechanical sensor and a method for manufacturing same are described. A secure diaphragm restraint, independent of fluctuations in the cavern etching process due to the process technology, and a free design of the diaphragm are made possible by designing a suitable connection of the diaphragm in an oxide layer created by local oxidation. The micromechanical sensor includes, for example, a substrate, an external oxide layer formed in a laterally external area in the substrate, a diaphragm having multiple perforation holes formed in a laterally internal diaphragm area, a cavern etched in the substrate beneath the diaphragm, whereby the diaphragm is suspended in a suspension area of the external oxide layer which tapers toward connecting points of the diaphragm and the diaphragm is situated in its vertical height between a top side and a bottom side of the external oxide layer.
Complete Metadata
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| accessLevel | public |
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| description | A micromechanical sensor and a method for manufacturing same are described. A secure diaphragm restraint, independent of fluctuations in the cavern etching process due to the process technology, and a free design of the diaphragm are made possible by designing a suitable connection of the diaphragm in an oxide layer created by local oxidation. The micromechanical sensor includes, for example, a substrate, an external oxide layer formed in a laterally external area in the substrate, a diaphragm having multiple perforation holes formed in a laterally internal diaphragm area, a cavern etched in the substrate beneath the diaphragm, whereby the diaphragm is suspended in a suspension area of the external oxide layer which tapers toward connecting points of the diaphragm and the diaphragm is situated in its vertical height between a top side and a bottom side of the external oxide layer. |
| distribution |
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"@type": "dcat:Distribution",
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"description": "Access the complete Patent AT-E399739-T1: [Translated] MICROMECHANICAL SENSOR on the official website.",
"downloadURL": "https://pubchem.ncbi.nlm.nih.gov/patent/AT-E399739-T1"
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|
| identifier | https://healthdata.gov/api/views/evde-q74d |
| issued | 2025-09-05 |
| keyword |
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"chemistry",
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| landingPage | https://healthdata.gov/d/evde-q74d |
| modified | 2025-09-06 |
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| publisher |
{
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"@type": "org:Organization"
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|
| theme |
[
"NIH"
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|
| title | Patent AT-E399739-T1: [Translated] MICROMECHANICAL SENSOR |
