Patent AT-E401364-T1: [Translated] ORGANIC SILICATE POLYMER AND COMPREHENSIVE INSULATING FILM
The present invention relates to an organic silicate polymer prepared by mixing silane compound with organic solvent to prepare a first mixture, and hydrolyzing and condensing the first mixture by adding water and catalyst, the first mixture being selected from a group consisting of oxidized hydrosilane, cyclic siloxane, a second mixture of oxidized hydrosilane and silane or silane oligomer, and a third mixture of cyclic siloxane and silane or silane oligomer, a composition for forming an insulation film of semiconductor devices prepared by using the organic silicate polymer, a method for preparing an insulation film using the composition, and a semiconductor device comprising the insulation film.
Complete Metadata
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| description | The present invention relates to an organic silicate polymer prepared by mixing silane compound with organic solvent to prepare a first mixture, and hydrolyzing and condensing the first mixture by adding water and catalyst, the first mixture being selected from a group consisting of oxidized hydrosilane, cyclic siloxane, a second mixture of oxidized hydrosilane and silane or silane oligomer, and a third mixture of cyclic siloxane and silane or silane oligomer, a composition for forming an insulation film of semiconductor devices prepared by using the organic silicate polymer, a method for preparing an insulation film using the composition, and a semiconductor device comprising the insulation film. |
| distribution |
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| identifier | https://healthdata.gov/api/views/trhf-rhfz |
| issued | 2025-09-05 |
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| modified | 2025-09-06 |
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| theme |
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| title | Patent AT-E401364-T1: [Translated] ORGANIC SILICATE POLYMER AND COMPREHENSIVE INSULATING FILM |
