Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[
"009:25"
]
|
| contactPoint |
{
"fn": "NIH/NCBI Data Team",
"@type": "vcard:Contact",
"hasEmail": "mailto:info@ncbi.nlm.nih.gov"
}
|
| description | A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof. |
| distribution |
[
{
"@type": "dcat:Distribution",
"title": "Official Data Source",
"mediaType": "text/html",
"description": "Access the complete Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION on the official website.",
"downloadURL": "https://pubchem.ncbi.nlm.nih.gov/patent/AT-E401430-T1"
}
]
|
| identifier | https://healthdata.gov/api/views/q7xi-s24w |
| issued | 2025-09-05 |
| keyword |
[
"chemistry",
"innovation",
"patent",
"pubchem",
"research"
]
|
| landingPage | https://healthdata.gov/d/q7xi-s24w |
| modified | 2025-09-06 |
| programCode |
[
"009:066"
]
|
| publisher |
{
"name": "National Center for Biotechnology Information (NCBI)",
"@type": "org:Organization"
}
|
| theme |
[
"NIH"
]
|
| title | Patent AT-E401430-T1: [Translated] DIAMOND COATINGS ON REACTOR WALLS AND METHOD FOR THEIR PRODUCTION |
