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X-ray Metrology for the Semiconductor Industry Tutorial
Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Regis Kline",
"hasEmail": "mailto:r.kline@nist.gov"
}
|
| description | Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry |
| distribution |
[
{
"title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial",
"format": "text/html",
"accessURL": "https://doi.org/10.18434/T4/1503330",
"description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial"
}
]
|
| identifier | 7CE906EBFAD7231EE0532457068153892009 |
| keyword |
[
"Semiconductor metrology",
"dimensional metrology",
"small angle x-ray scattering"
]
|
| landingPage | https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2018-12-01 |
| programCode |
[
"006:045"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| theme |
[
"Electronics:Semiconductors",
"Metrology:Dimensional metrology",
"Nanotechnology:Nanoelectronics",
"Nanotechnology:Nanometrology"
]
|
| title | X-ray Metrology for the Semiconductor Industry Tutorial |
