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NIST MEMS Calculator - SRD 166
This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.
Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[
"006:55"
]
|
| contactPoint |
{
"fn": "Richard A. Allen",
"hasEmail": "mailto:richard.allen@nist.gov"
}
|
| description | This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine. |
| distribution |
[
{
"title": "DOI Access to NIST MEMS Calculator - SRD 166",
"format": "text/html",
"accessURL": "https://dx.doi.org/10.18434/T4CS3T",
"mediaType": "text/html",
"description": "DOI Access to NIST MEMS Calculator - SRD 166"
}
]
|
| identifier | FDB5909746905200E043065706813E54152 |
| keyword |
[
"ASTM",
"MEMS 5 in 1",
"MEMS Calculators",
"Micro Electro Mechanical Systems",
"Semiconductor Equipment and Materials International",
"Standard Reference Material",
"Young's modulus measurements",
"cantilevers",
"data analysis sheets",
"fixed-fixed beams",
"height measurements",
"interferometries",
"length measurements",
"residual strains",
"residual stresses",
"steps",
"strain gradients",
"stress gradients",
"test structures",
"thick",
"vibrometries"
]
|
| landingPage | http://pml.nist.gov/test-structures/MEMSCalculator.htm |
| language |
[
"en"
]
|
| license | https://www.nist.gov/open/license |
| modified | 2014-05-22 00:00:00 |
| programCode |
[
"006:052"
]
|
| publisher |
{
"name": "National Institute of Standards and Technology",
"@type": "org:Organization"
}
|
| references |
[
"http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf",
"http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf",
"http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186",
"http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939",
"https://dx.doi.org/10.6028/NIST.SP.260-177",
"https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry"
]
|
| theme |
[
"Electronics:Semiconductors",
"Standards:Reference data",
"Standards:Reference materials"
]
|
| title | NIST MEMS Calculator - SRD 166 |
